Devices
Fundamentals of SiC Power Devices
Prof. Victor Veliadis
PowerAmerica / North Carolina State University, USA
Abstract
There are several reasons behind silicon's dominance of the power device market. Silicon is renowned for its excellent starting material quality, streamlined fabrication, opportunity for low-cost mass production, proven reliability, and circuit design legacy. However, despite significant progress, silicon devices are now approaching their operational limits. They are held back by their relatively low bandgap and low critical electric field, traits that result in high conduction and switching losses, and substandard high-temperature performance.
In this tutorial, the favorable material properties of Silicon Carbide (SiC), which allow for highly efficient power devices with reduced form-factor and cooling requirements, will be summarized. The co-existence of Si, SiC, and GaN will be discussed, and their respective competitive application advantages highlighted. The tutorial will highlight design aspects of diodes, JFETs, and planar and trench MOSFETs, which are presently being inserted in most SiC based power electronic systems. Material and device fabrication aspects will be presented with an emphasis on the processes that do not carry over from the mature Si manufacturing world and are thus specific to SiC. The nine to tenfold increase in critical electric field strength of SiC over that of Si allows high voltage blocking layers to be fabricated significantly thinner than those of similarly rated Si devices. However, the lack of a well-designed edge termination structure can diminish the high voltage performance of SiC power devices due to electric field crowding. Consequently, specialized edge termination structures are utilized to maximize breakdown voltage, and will be discussed.
Biography
Dr. Victor Veliadis is Executive Director & CTO of PowerAmerica, a member-driven Department of Energy (DOE) Manufacturing USA Institute of industry, universities, and national labs accelerating the commercialization of energy efficient silicon-carbide and gallium-nitride power semiconductor chips and electronics. At PowerAmerica, he has managed a budget of $156 million, which he strategically allocated to 212 industrial and university projects to catalyze SiC and GaN semiconductor and power electronics manufacturing, workforce development, and job creation. His PowerAmerica educational activities have trained 430 full-time university students in collaborative industry-university wide bandgap projects, and engaged over 8000 attendees in tutorials, short courses, and webinars. Since 2024, Dr. Veliadis has been managing a $64M DOE renewal to further catalyze WBG power technologies.
Dr. Veliadis is a professor at NC State University's Department of Electrical and Computer Engineering, an IEEE Fellow, a National Academy of Inventors (NAI) Fellow, and an IEEE Electron Device Society Distinguished Lecturer. He has 27 issued U.S. patents, 13 book chapters, one co-edited book, and 173 peer-reviewed publications to his credit. Prior to entering academia and taking an executive position at PowerAmerica in 2016, Dr. Veliadis spent 21 years post-Ph.D. in the semiconductor industry, where his work included design, fabrication, and testing of SiC devices, GaN devices for radar systems, and financial and operations management of a commercial semiconductor fab. He has received military training in the Army Infantry and is a third-degree black belt in Shotokan karate. Dr. Veliadis earned a Ph.D. in Electrical Engineering from Johns Hopkins University (1995).
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